The Phase I of this project includes 110,000 SF semi-conductor manufacturing facility and 4,000 SF class 10 clean room. The Phase II of this project includes a semi-conductor manufacturing facility, 21,000 SF central plant, 6,200 SF liquid and gas storage and distribution facility, 15,700 SF support facility and 24,100 SF class 10 clean room. The Phase III of this project includes 24,100 SF technology conversion for semi-conductor manufacturing facility.